Elaboration and Characterization of Indium Samarium Oxide (ISO) Semiconductor Thin Film Using Pneumatic Spray Pyrolysis.

Abstract

Our work concerns the elaboration and the characterization of the conducting transparent oxide thin films of undoped and samarium doped indium oxide. The pneumatic spray pyrolysis technique has grown these films using indium chloride as precursor solution (InCl3). In the first part of this thesis, we realized pure indium oxide [ In2O3] and the samarium doped indium oxide using the mixture [ SmO3: In2O3]. We studied the structural, morphological, and optical properties of these thin films. Various characterization techniques of materials analyze these films. The structural characterization of films by analysis of the X-ray diffraction spectra showed that the films undoped and samarium doped indium oxide present a preferential direction according to the plan (400). The UV-Visible spectrophotometer of these films confirms that it is possible to obtain good transparent films of TCO with a transmittance of about 75 to 85% in the visible range; moreover, there is an increase in the optical bandgap from 3. 22 to 3. 23 eV. Based on SEM images, thin films were found to be polycrystalline with a cubic structure. The films are characterized by their rough surface, and the morphology of the grains present a preferred growth direction in a pyramidal shape